Design and Fabrication Challenges of a Highly Sensitive Thermoelectric-Based Hydrogen Gas Sensor

Design and Fabrication Challenges of a Highly Sensitive Thermoelectric-Based Hydrogen Gas Sensor

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This paper presents a highly sensitive thermoelectric sensor for catalytic combustible gas detection.The sensor contains two low-stress (+176 MPa) membranes of a combination of stoichiometric and silicon-rich silicon nitride that makes them chemically and thermally stable.The complete Mens Bags fabrication process with details, especially the challenges and their solutions, is discussed elaborately.In addition, a comprehensive evaluation of design criteria and a comparative analysis of different sensor designs are performed with respect to the homogeneity of the temperature field on the membrane, power consumption, and thermal Chairs w/Table Set (3/CN) sensitivity.

Evaluating the respective tradeoffs, the best design is selected.The selected sensor has a linear thermal characteristic with a sensitivity of 6.54 mV/K.Additionally, the temperature profile on the membrane is quite homogeneous (20% root mean standard deviation), which is important for the stability of the catalytic layer.

Most importantly, the sensor with a ligand (p-Phenylenediamine (PDA))-linked platinum nanoparticles catalyst shows exceptionally high response to hydrogen gas, i.e., 752 mV at 2% concentration.